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Enhancing performance and reliability for semiconductor manufacturing

Today's new generation of compact and feature-rich electronic devices – requiring the use of increasingly-complex IC structures packed onto ever-smaller footprints – has created enormous challenges for semiconductor manufacturers.

To help you meet those challenges, the 3M™ Novec™ Products line includes a broad range of heat transfer fluids, cleaning solvents and surfactants. These next-generation compounds are designed to increase throughput, performance and reliability, while helping you keep costs under control.

Novec fluids are used in a number of front-end wafer manufacturing applications, including:

These versatile products are useful in processes ranging from buffered oxide etch (BOE) mixtures to non-damaging photoresist strip; Bosch etch residue removal; wafer cleaning and drying; and heat transfer for wafer platen temperature control.

Helping to reduce your carbon footprint, while improving workplace safety

The favorable environmental and safety properties of Novec fluids can help you meet greenhouse gas reduction targets and reduce regulatory reporting burden, while contributing to a safer, healthier workplace.

With zero ozone depletion potential, low global warming potentials and short atmospheric lifetimes, Novec fluids offer semiconductor manufacturers an effective means to replace greenhouse gases such as PFCs and HFCs, enabling a significant reduction in your carbon footprint. At the same time, Novec fluids are nonflammable and low in toxicity, allowing them to be used safely in a wide variety of applications.


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