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Heat Transfer Solutions for Semiconductor Applications

A new generation of high-efficiency heat transfer solutions

Thermal management challenges are becoming increasingly important to semiconductor manufacturers. New equipment designs put more demands on the dielectric fluids used to maintain proper temperatures. And environmental concerns have become a critical factor in fab/plant operating decisions.

3M™ Novec™ Engineered Fluids are ideally suited to address these concerns. These nonflammable, non-corrosive materials offer an outstanding balance of heat transfer efficiency, low environmental impact and worker safety. Because of this, these inert cooling fluids are widely used for thermal management in many critical semiconductor manufacturing operations, from chuck cooling and automated testing to etching, ion implantation, photolithography and more.

The unique properties of Novec fluids combine to give you efficient heat transfer, lower maintenance costs and improved worker safety -- while helping to reduce your facility's greenhouse gas emissions. Replacing perfluorocarbon (PFC) or perfluoropolyether (PFPE) heat transfer fluids with Novec fluids results in greenhouse gas emission reduction of up to 99%:

  • Excellent dielectric properties
  • Wide range of boiling points
  • Good materials compatibility
  • Low toxicity and non-flammability
  • Low global warming potential (GWP)
  • Zero ozone depletion potential (ODP)
  • Exempt from the U.S. EPA definition of a VOC

These dielectric heat transfer fluids require little maintenance and will not damage electronic equipment or integrated circuits in the event of a leak or other failure. Systems using 3M heat transfer fluids offer not only dependable performance, but in many cases have been shown to be less costly and easier to maintain than those using DI water.

3M™ Novec™ Engineered Fluids for Heat Transfer (Boiling Points)
Novec 7000 Novec 7100 Novec 7200 Novec 7300 Novec 7500
34°C 61°C 76°C 98°C 128°C
Chart showing recommended operating temperature range

Whether for single-phase or two-phase systems, 3M has the broad range of thermal management fluids and technical support you need to make the right choice for your particular needs. For more information, contact our thermal management experts today They are available to help you choose the right thermal management fluid to improve reliability, address environmental concerns, and lower your overall operating costs.


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