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Thermal Management



3M heat transfer fluids are used in many critical semiconductor manufacturing applications, from direct cooling and automated testing to etching, ion implantation, photolithography and more. These dielectric heat transfer fluids require little maintenance and will not damage electronic equipment or integrated circuits in the event of a leak or other failure. Systems using 3M heat transfer fluids offer not only dependable performance, but in many cases have been shown to be less costly and easier to maintain than those using DI water.

Product Families

3M™ Novec™ Engineered Fluids were developed to provide an outstanding balance of performance, safety and environmental properties. These segregated hydrofluoroether (HFE) products offer:

  • Zero ozone depletion potential
  • Low global warming potential
  • Low toxicity
  • Compatibility with a wide range of metals, plastics, and elastomers

They are also nonflammable and are not classified as volatile organic compounds (VOCs). We recommend the following Novec Engineered Fluids for your thermal management needs:

3M™ Novec™ Engineered Fluid HFE-7000
3M™ Novec™ Engineered Fluid HFE-7100
3M™ Novec™ Engineered Fluid HFE-7200
3M™ Novec™ Engineered Fluid 7300
3M™ Novec™ Engineered Fluid HFE-7500

3M™ Novec™ Engineered Fluids

3M™ Novec™ Engineered Fluids

New fluid technology offering zero ozone depletion potential (ODP), low global warming potential, and low toxicity. Non-flammable. For use in industrial and commercial cleaning, lubricant deposition, heat transfer and a wide variety of specialty applications.

3M™ Fluorinert™ Electronic Liquids are part of a family of fully-fluorinated compounds known as perfluorocarbons, or PFCs. Nonflammable 3M™ Fluorinert™ liquids have a high dielectric constant and are available in a wide range of boiling points. They offer good materials compatibility, low toxicity, and zero ozone depletion potential.

Please note that 3M™ Fluorinert™ liquids have high global warming potentials and long atmospheric lifetimes. As such, their use should be carefully managed to minimize emissions. We recommend the following Fluorinert liquids for your thermal management application:

3M™ Fluorinert™ Electronic Liquid FC-72
3M™ Fluorinert™ Electronic Liquids FC-84
3M™ Fluorinert™ Electronic Liquids FC-77
3M™ Fluorinert™ Electronic Liquids FC-3283
3M™ Fluorinert™ Electronic Liquids FC-40
3M™ Fluorinert™ Electronic Liquids FC-43
3M™ Fluorinert™ Electronic Liquids FC-70

We recommend that users of 3M™ Fluorinert™ liquids further limit emissions by employing good conservation practices, and by implementing recovery, recycling and/or proper disposal procedures.

3M™ Fluorinert™ Electronic Liquids

3M™ Fluorinert™ Electronic Liquids

Perfluorinated liquids used in electronic reliability, hermetic seal, gross leak, and thermal shock testing over a wide range of boiling points.