3M offers a broad line of advanced chemistries that have demonstrated outstanding performance in a wide variety of general electronics cleaning and drying applications.
Selected 3M™ Novec™ Engineered Fluids have properties suitable to wet cleaning of dry etcher parts:
Faster cleaning than IPA or acetone with the use of heat or ultrasonics
Eliminate or reduce manual and ultrasonic cleaning
Dry cleanly with no residue
Low global warming potential and zero ozone depletion potential
Nonflammable and non-VOC (HFE-7100 and HFE-7200)
Low toxicity and excellent materials compatibility
These cleaning fluids will meet both your performance requirements and satisfy the needs of workers and regulators. For dry etcher parts cleaning, we recommend one the following Novec fluids:
New fluid technology offering zero ozone depletion potential (ODP), low global warming potential, and low toxicity. Non-flammable. For use in industrial and commercial cleaning, lubricant deposition, heat transfer and a wide variety of specialty applications.
New fluid technology offering zero ozone depletion potential (ODP), low global warming potential, and low toxicity. Non-flammable. For use in industrial and commercial cleaning, lubricant deposition, heat transfer and a wide variety of specialty applications.
