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Equipment & Tool Cleaning



3M offers a broad line of advanced chemistries that have demonstrated outstanding performance in a wide variety of general electronics cleaning and drying applications.

Common Applications

Dry Etcher Parts Cleaning Fluids

Selected 3M™ Novec™ Engineered Fluids have properties suitable to wet cleaning of dry etcher parts:

  • Faster cleaning than IPA or acetone with the use of heat or ultrasonics
  • Eliminate or reduce manual and ultrasonic cleaning
  • Dry cleanly with no residue
  • Low global warming potential and zero ozone depletion potential
  • Nonflammable and non-VOC (HFE-7100 and HFE-7200)
  • Low toxicity and excellent materials compatibility

These cleaning fluids will meet both your performance requirements and satisfy the needs of workers and regulators. For dry etcher parts cleaning, we recommend one the following Novec fluids:

3M™ Novec™ Engineered Fluid HFE-7100
3M™ Novec™ Engineered Fluid HFE-7200
3M™ Novec™ Engineered Fluid HFE-71IPA

3M™ Novec™ Engineered Fluids

3M™ Novec™ Engineered Fluids

New fluid technology offering zero ozone depletion potential (ODP), low global warming potential, and low toxicity. Non-flammable. For use in industrial and commercial cleaning, lubricant deposition, heat transfer and a wide variety of specialty applications.

Wafer Carrier Cleaning Fluids

3M™ Novec™ Engineered Fluids are extremely effective for particulate cleaning of all SEMI-standard 300 mm FOUPs (Front-Opening Unified Pods):

  • Very fast cycle time
  • Ability to clean and dry FOUP doors effectively
  • Low cost of ownership versus aqueous cleaning
  • High cleaning efficiency
  • Complete drying

We recommend one of the following Novec fluids for your FOUP cleaning needs:

3M™ Novec™ Engineered Fluid HFE-7200
3M™ Novec™ Engineered Fluid HFE-7200DL

3M™ Novec™ Engineered Fluids

3M™ Novec™ Engineered Fluids

New fluid technology offering zero ozone depletion potential (ODP), low global warming potential, and low toxicity. Non-flammable. For use in industrial and commercial cleaning, lubricant deposition, heat transfer and a wide variety of specialty applications.